Nucleation and growth studies of large-area deposited WS\(_2\) on flexible substrates
- Transition metal dichalcogenides (TMDCs) such as tungsten disulfide (WS\(_2\)) are studied for advanced electronic and optical devices because of their unique and versatile electrical, optical and mechanical properties. For the use of TMDC films in next-generation flexible electronics, large-area bottom-up synthesis on flexible substrates needs to be mastered, understood and controlled. In this study, we performed a detailed study on the nucleation and growth of WS\(_2\) layers deposited by metalorganic chemical vapor deposition (MOCVD) on crystalline van-der-Waals material muscovite mica as a model substrate and on the alkali-metal free flexible glass \(\textit {AF 32® eco}\). The deposition of the WS\(_2\) layers was performed using an all nitrogen-coordinated bis-imido-bis-amido tungsten based precursor in combination with elemental sulfur as the co-reactant. On both substrates, crystalline growth of WS\(_2\) at a moderate growth temperature of 600 °C was verified by Raman spectroscopy and X-ray diffraction (XRD). However, the growth mode and nucleation density differ significantly. On mica, an initially planar growth of WS\(_2\) triangular islands is observed, whereas untreated glass reveals an out-off plane growth. Detailed XRD and Raman analysis show tensile strain in the WS\(_2\) films on both substrates, indicating a strong interaction from CVD grown TMDC films with the underlying carrier material. In order to avoid such substrate-semiconductor interaction, a substrate pre-treatment is required. A plasma pre-treatment prior to the deposition leads to a planar growth even on amorphous glass substrates.
Author: | Thomas BerningORCiDGND, Malte BecherORCiDGND, Jan-Lucas WreeORCiDGND, Julia JagoszORCiDGND, Aleksander KostkaORCiDGND, Andreas OstendorfORCiDGND, Anjana DeviORCiDGND, Claudia BockORCiDGND |
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URN: | urn:nbn:de:hbz:294-108759 |
DOI: | https://doi.org/10.1088/2053-1591/ac9bd0 |
Parent Title (English): | Materials research express |
Publisher: | IOP Publishing |
Place of publication: | Bristol, Vereinigtes Königreich |
Document Type: | Article |
Language: | English |
Date of Publication (online): | 2024/02/16 |
Date of first Publication: | 2022/11/03 |
Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
Tag: | CVD; WS\(_2\); flexible glass; large-area growth; mucvovite mica; nucleation |
Volume: | 9 |
Issue: | 11, Artikel 116401 |
First Page: | 116401-1 |
Last Page: | 116401-14 |
Institutes/Facilities: | Lehrstuhl für Mikrosystemtechnik |
Dewey Decimal Classification: | Technik, Medizin, angewandte Wissenschaften / Elektrotechnik, Elektronik |
open_access (DINI-Set): | open_access |
faculties: | Fakultät für Elektrotechnik und Informationstechnik |
Licence (English): | Creative Commons - CC BY 4.0 - Attribution 4.0 International |