Photothermal investigation of temperature fields and local thermophysical properties in coatings and semiconductors

  • Thermal wave techniques are applied to study heat transport in nano- and micro scaled systems in order to improve thermal management in such devices. Using modulated IR radiometry, the heat transport in Cu-C samples with and without Mo bond layers are measured. Bond layer diffusion effects and re-crystallization of the Cu films are observed on heat treatment. The thermal wave contrast related to the thermal contact resistance is found to correlate with the mechanical adhesion strength. In order to localize heat sources in HEMT nanostructures, a new technique combining Scanning Thermal Microscopy and Scanning Thermoelastic Microscopy was developed, providing simultaneously topological, thermal, and thermoelastic information. This technique revealed detailed information on size and shape of the heat source. The problems arising from the unknown thermal contact between tip and surface could also be eliminated and the thermal expansion was measured absolutely by a novel calibration method.

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Metadaten
Author:Sutharat ChotikaprakhanGND
URN:urn:nbn:de:hbz:294-18842
Referee:Josef PelzlGND, Andreas D. WieckORCiDGND
Document Type:Doctoral Thesis
Language:English
Date of Publication (online):2007/04/02
Date of first Publication:2007/04/02
Publishing Institution:Ruhr-Universität Bochum, Universitätsbibliothek
Granting Institution:Ruhr-Universität Bochum, Fakultät für Physik und Astronomie
Date of final exam:2007/01/22
Creating Corporation:Fakultät für Physik und Astronomie
GND-Keyword:Rastersondenmikroskopie; Kupfer / Kohlenstoff / Grenzfläche / Wärmequelle; Kontaktwiderstand; Temperaturverteilung; Thermophysikalische Eigenschaft
Institutes/Facilities:Institut für Experimentalphysik III
Dewey Decimal Classification:Naturwissenschaften und Mathematik / Physik
faculties:Fakultät für Physik und Astronomie
Licence (German):License LogoKeine Creative Commons Lizenz - es gelten der Veröffentlichungsvertrag und das deutsche Urheberrecht