Investigation of thermal transport in layered sytems and micro-structured semiconductor devices by photothermal techniques and finite element simulations
- Aim of work is the study of layered systems and microstructured devices by photothermal techniques and finite element simulations. First, the phases and amplitudes of the photothermal signals measured on different layered structures are analysed and interpreted to check out their thermal transport properties. The effects of lateral thermal transport in these systems as well as the coating semi-transparency are investigated and the quantititative interpretation is improved with the help of a new inverse method. It is shown that applying controlled displacement between excitation and detection spots intentionally in thermal microscopy can help getting information on the lateral heat transport properties and improved localization of heat sources. Then FE simulations are performed to predict the thermal behaviour of microstructured semiconductor devices. The obtained results are proven experimentally by measurements using scanning thermal microscopy and scanning thermoelastic microscopy.
Author: | Jean Lazare Nzodoum FotsingGND |
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URN: | urn:nbn:de:hbz:294-11949 |
Referee: | Josef PelzlGND, Andreas D. WieckORCiDGND |
Document Type: | Doctoral Thesis |
Language: | English |
Date of Publication (online): | 2005/01/11 |
Date of first Publication: | 2005/01/11 |
Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
Granting Institution: | Ruhr-Universität Bochum, Fakultät für Physik und Astronomie |
Date of final exam: | 2004/07/14 |
Creating Corporation: | Fakultät für Physik und Astronomie |
GND-Keyword: | Hot Spot (Physik); Dünnschichttransistor; Wärmeausdehnung; Finite-Elemente-Methode; Verlustwärme |
Dewey Decimal Classification: | Naturwissenschaften und Mathematik / Physik |
faculties: | Fakultät für Physik und Astronomie |
Licence (German): | Keine Creative Commons Lizenz - es gelten der Veröffentlichungsvertrag und das deutsche Urheberrecht |