Investigation of thermal transport in layered sytems and micro-structured semiconductor devices by photothermal techniques and finite element simulations

  • Aim of work is the study of layered systems and microstructured devices by photothermal techniques and finite element simulations. First, the phases and amplitudes of the photothermal signals measured on different layered structures are analysed and interpreted to check out their thermal transport properties. The effects of lateral thermal transport in these systems as well as the coating semi-transparency are investigated and the quantititative interpretation is improved with the help of a new inverse method. It is shown that applying controlled displacement between excitation and detection spots intentionally in thermal microscopy can help getting information on the lateral heat transport properties and improved localization of heat sources. Then FE simulations are performed to predict the thermal behaviour of microstructured semiconductor devices. The obtained results are proven experimentally by measurements using scanning thermal microscopy and scanning thermoelastic microscopy.

Download full text files

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Jean Lazare Nzodoum FotsingGND
URN:urn:nbn:de:hbz:294-11949
Referee:Josef PelzlGND, Andreas D. WieckORCiDGND
Document Type:Doctoral Thesis
Language:English
Date of Publication (online):2005/01/11
Date of first Publication:2005/01/11
Publishing Institution:Ruhr-Universität Bochum, Universitätsbibliothek
Granting Institution:Ruhr-Universität Bochum, Fakultät für Physik und Astronomie
Date of final exam:2004/07/14
Creating Corporation:Fakultät für Physik und Astronomie
GND-Keyword:Hot Spot (Physik); Dünnschichttransistor; Wärmeausdehnung; Finite-Elemente-Methode; Verlustwärme
Dewey Decimal Classification:Naturwissenschaften und Mathematik / Physik
faculties:Fakultät für Physik und Astronomie
Licence (German):License LogoKeine Creative Commons Lizenz - es gelten der Veröffentlichungsvertrag und das deutsche Urheberrecht