The multipole resonance probe
- The multipole resonance probe (MRP) is an innovative sensor suitable for monitoring and control of industrial plasma processes. It is a realization of "active plasma resonance spectroscopy", a class of electromagnetic diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. A signal in the GHz range is fed to the plasma via an electrical probe; the spectral response \(\it S\)(\(\omega\)) is recorded, and then evaluated with a mathematical model to obtain information on the internal plasma parameters. In this study, a spectral kinetic model of the MRP is discussed. It is superior to previous analyses based on the Drude model, as it allows to determine not only the electron density n\(_e\) but also the electron temperature T\(_e\) from \(\it S\)(\(\omega\)). Good agreement with independent measurements shows the suitability of the model.
| Author: | Junbo GongORCiDGND, Michael FriedrichsORCiDGND, Jens OberrathORCiDGND, Ralf Peter BrinkmannORCiDGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-108738 |
| DOI: | https://doi.org/10.1088/1361-6595/ac9753 |
| Parent Title (English): | Plasma sources science and technology |
| Subtitle (English): | simultaneous determination of electron density and electron temperature using spectral kinetic simulation |
| Publisher: | IOP Publishing |
| Place of publication: | Bristol, Vereinigtes Königreich |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2024/02/16 |
| Date of first Publication: | 2022/11/09 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Tag: | kinetic model; multipole resonance probe; plasma diagnostics |
| Volume: | 31 |
| Issue: | 11, Artikel 115009 |
| First Page: | 115009-1 |
| Last Page: | 115009-11 |
| Institutes/Facilities: | Lehrstuhl für Theoretische Elektrotechnik |
| Dewey Decimal Classification: | Technik, Medizin, angewandte Wissenschaften / Elektrotechnik, Elektronik |
| open_access (DINI-Set): | open_access |
| faculties: | Fakultät für Elektrotechnik und Informationstechnik |
| Licence (English): |  Creative Commons - CC BY 4.0 - Attribution 4.0 International |
